Course description
Micro and Nanofabrication (MEMS)
Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.
Who should attend?
Prerequisites:
Basics in Physics and Chemistry
Training content
- MEMS and cleanroom introduction
- Chemical vapor deposition (CVD)
- Physical vapor deposition (PVD)
- Lithography
- Dry etching
- Wet etching
- Inspection and metrology
Course delivery details
This course is offered through Swiss Federal Institute of Technology Lausanne, a partner institute of EdX.
3-5 hours per week
Costs
- Verified Track -$199
- Audit Track - Free
Certification / Credits
What you'll learn
- How to select the correct fabrication process for a specific micro-device or microsystem
- Establish the workflow for the cleanroom processes
- Identify how physical and chemical phenomena govern miniaturized systems for various applications
- Resource planning for a given microsystem fabrication
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Contact info
edX
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